Engineering: Cornell Quarterly, Vol.18, No.1/2 (Spring 1983): Discovery of the Submicron Domain
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IN THIS ISSUE: Discovery in a New Domain: Research at the National Submicron Facility /2 Edward D. Wolf ... A Walking Tour of Knight Laboratory /7 Hillary Rettig ... Using the Submicron Facility: A Unique Opportunity for Researchers Throughout the United States /15 ... Improved Polymers for Advanced Lithography /19 Ferdinand Rodriguez ... Microstructures and Materials Science at the National Submicron Facility /23 ... Electrons, Ions, and Photons in Submicron Research: 1. Nanolithography with Electron Beams /28 Michael S. Isaacson ... 2. Ion Beams for Very-High-Re solution Lithography /33 Benjamin M. Siegel ... 3. Light Transmission Through Submicron Apertures /36 Aaron Lewis and Michael S. Isaacson ... Microphysics for the Future : 1. Periodic Submicron Structures /41 Neil W. Ashcroft ... 2. Submicron Structures at Very Low Temperatures /44 Robert C. Richardson ... Register /47 .... Vantage /53 ... Faculty Publications /59 ... Letters /64